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High- sensitivity interferometric schemes for ML2 micromirror calibrationsWANG, Jen-Shiang; SOLGAARD, Olav; NEUREUTHER, Andrew R et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6194-6, 2Vol, vol 1,615112.1-615112.8Conference Paper